Granted Patent
Utility
US 6,732,550 · App. 09/948,486
Method for performing a deep trench etch for a planar lightwave circuit
Inventor:
Jongik Won
Patented Case
View Patent ↗
Granted: May 11, 2004
Filed: Sep 6, 2001
Inventor
Jongik Won
Assignee (at issue)
LIGHTWAVE MICROSYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.