Granted Patent
Utility
US 6,732,855 · App. 09/658,152
Conveying element and conveyor means for conveying wafer receptacles, and method
Inventors:
Michael Lering, Volker Tegeder, Clinton Haris
Patented Case
View Patent ↗
Granted: May 11, 2004
Filed: Sep 8, 2000
Inventors
Michael Lering
Volker Tegeder
Clinton Haris
Assignees (at issue)
Motorola, Inc.
Semiconductor 300 GmbH & Co. KG
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.