Granted Patent
Utility
US 6,733,369 · App. 10/261,455
Method and apparatus for polishing or lapping an aspherical surface of a work piece
Inventors:
Siegfried Stacklies, Yaolong Chen
Patented Case
View Patent ↗
Granted: May 11, 2004
Filed: Sep 30, 2002
Inventors
Siegfried Stacklies
Yaolong Chen
Assignee (at issue)
Carl Zeiss Semiconductor Manufacturing Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.