Granted Patent
Utility
US 6,733,936 · App. 10/247,877
Method for generating a swing curve and photoresist feature formed using swing curve
Inventors:
Yiming Gu, John L. Sturtevant
Patented Case
View Patent ↗
Granted: May 11, 2004
Filed: Sep 19, 2002
Inventors
Yiming Gu
John L. Sturtevant
Assignee (at issue)
Integrated Device Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.