Granted Patent
Utility
US 6,734,028 · App. 10/113,152
Method of detecting shallow trench isolation corner thinning by electrical stress
Inventors:
Tien-Chun Yang, Nian Yang, Hyeon-Seag Kim
Patented Case
View Patent ↗
Granted: May 11, 2004
Filed: Mar 28, 2002
Inventors
Tien-Chun Yang
Nian Yang
Hyeon-Seag Kim
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.