Granted Patent
Utility
US 6,734,077 · App. 10/234,547
Method for fabricating a trench capacitor for a semiconductor memory
Inventors:
Matthias Forster, Kristin Schupke, Anja Morgenschweis, Anett Moll, Jens-Uwe Sachse
Patented Case
View Patent ↗
Granted: May 11, 2004
Filed: Sep 4, 2002
Inventors
Matthias Forster
Kristin Schupke
Anja Morgenschweis
Anett Moll
Jens-Uwe Sachse
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.