Granted Patent
Utility
US 6,734,097 · App. 09/965,094
Liner with poor step coverage to improve contact resistance in W contacts
Inventors:
Roy Iggulden, Padraic Shafer, Werner Robl, Kwong Hon Wong
Patented Case
View Patent ↗
Granted: May 11, 2004
Filed: Sep 28, 2001
Inventors
Roy Iggulden
Padraic Shafer
Werner Robl
Kwong Hon Wong
Assignees (at issue)
Infineon Technologies AG
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.