Granted Patent
Utility
US 6,734,439 · App. 10/054,325
Wafer pedestal tilt mechanism and cooling system
Inventors:
Allan D. Weed, Roger B. Fish
Patented Case
View Patent ↗
Granted: May 11, 2004
Filed: Oct 25, 2001
Inventors
Allan D. Weed
Roger B. Fish
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.