Granted Patent
Utility
US 6,735,236 · App. 09/451,407
High power gas discharge laser with line narrowing unit
Inventors:
Raymond F. Cybulski, Alexander I. Ershov, Eckehard D. Onkels, Palash P. Das, Danilo K. Richardson, Jesse Buck
Patented Case
View Patent ↗
Granted: May 11, 2004
Filed: Nov 30, 1999
Inventors
Raymond F. Cybulski
Alexander I. Ershov
Eckehard D. Onkels
Palash P. Das
Danilo K. Richardson
Jesse Buck
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.