Granted Patent
Utility
US 6,736,147 · App. 09/764,523
Semiconductor-processing device provided with a remote plasma source for self-cleaning
Inventors:
Kiyoshi Satoh, Kazuo Sato, Hideaki Fududa
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Jan 18, 2001
Inventors
Kiyoshi Satoh
Kazuo Sato
Hideaki Fududa
Assignee (at issue)
ASM Japan K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.