Granted Patent
Utility
US 6,736,150 · App. 10/359,844
Fluid heating system for processing semiconductor materials
Inventor:
Kert Dolechek
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Feb 6, 2003
Inventor
Kert Dolechek
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.