Granted Patent
Utility
US 6,736,268 · App. 10/013,305
Transport module
Inventors:
David L. Nyseth, Dennis Krampotich, Todd M. Ulschmid, Gregory Bores
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Nov 13, 2001
Inventors
David L. Nyseth
Dennis Krampotich
Todd M. Ulschmid
Gregory Bores
Assignee (at issue)
ENTEGRIS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.