Granted Patent
Utility
US 6,736,593 · App. 10/108,530
Protective device for a turbo molecular pump and method of protecting a turbo molecular pump
Inventors:
Hirotaka Namiki, Akira Yamauchi
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Mar 27, 2002
Inventors
Hirotaka Namiki
Akira Yamauchi
Assignee (at issue)
BOC Edwards Technologies Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.