Granted Patent
Utility
US 6,736,714 · App. 08/941,386
Polishing silicon wafers
Inventor:
Walter Dudovicz
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Sep 30, 1997
Inventor
Walter Dudovicz
Assignee (at issue)
Praxair S.T. Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.