Granted Patent
Utility
US 6,736,929 · App. 10/199,924
Distributed control system for semiconductor manufacturing equipment
Inventors:
Srinivasan Komandur, Jalal Ashjaee
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Jul 19, 2002
Inventors
Srinivasan Komandur
Jalal Ashjaee
Assignee (at issue)
Nutool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.