Granted Patent
Utility
US 6,736,952 · App. 09/781,593
Method and apparatus for electrochemical planarization of a workpiece
Inventors:
Ismail Emesh, Saket Chadda, Nikolay Korovin, Brian L. Mueller
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Feb 12, 2001
Inventors
Ismail Emesh
Saket Chadda
Nikolay Korovin
Brian L. Mueller
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.