Granted Patent
Utility
US 6,737,365 · App. 10/395,447
Forming a porous dielectric layer
Inventors:
Grant Kloster, Kevin P. O'Brien, Justin K. Brask, Michael Goodner, Donald Bruner
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Mar 24, 2003
Inventors
Grant Kloster
Kevin P. O'Brien
Justin K. Brask
Michael Goodner
Donald Bruner
Assignee (at issue)
Intel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.