Granted Patent
Utility
US 6,737,613 · App. 10/395,179
Heat treatment apparatus and method for processing substrates
Inventors:
Takatomo Yamaguchi, Kazuhiro Morimitsu, Tatsuhisa Matsunaga
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Mar 25, 2003
Inventors
Takatomo Yamaguchi
Kazuhiro Morimitsu
Tatsuhisa Matsunaga
Assignee (at issue)
Hitachi Kokusai Electric Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.