Granted Patent
Utility
US 6,737,643 · App. 09/811,904
Detector and method for cluster ion beam diagnostics
Inventors:
Richard Torti, Matthew C. Gwinn, Jerald P. Dykstra
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Mar 19, 2001
Inventors
Richard Torti
Matthew C. Gwinn
Jerald P. Dykstra
Assignee (at issue)
Epion Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.