Granted Patent
Utility
US 6,737,672 · App. 09/935,090
Semiconductor device, manufacturing method thereof, and semiconductor manufacturing apparatus
Inventors:
Akito Hara, Fumiyo Takeuchi, Kenichi Yoshino, Nobuo Sasaki
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Aug 22, 2001
Inventors
Akito Hara
Fumiyo Takeuchi
Kenichi Yoshino
Nobuo Sasaki
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.