IP Library Granted Patent US 6,737,826
Granted Patent Utility
US 6,737,826 · App. 10/196,066

Substrate transport apparatus with multiple independent end effectors

Inventor: Ulysses Gilchrist
Patented Case View Patent ↗
Granted: May 18, 2004 Filed: Jul 15, 2002
Inventor
Ulysses Gilchrist
Assignee (at issue)
Brooks Automation GmbH

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Quick Facts
Patent No.
US 6,737,826
App. No.
10/196,066
Filed
2002-07-15
Granted
2004-05-18
Kind
B2