Granted Patent
Utility
US 6,739,013 · App. 09/950,437
Wafer cleaning apparatus
Inventors:
Walter Glashauser, Lutz Teichgräber
Patented Case
View Patent ↗
Granted: May 25, 2004
Filed: Sep 10, 2001
Inventors
Walter Glashauser
Lutz Teichgräber
Assignee (at issue)
Infineon Technologies SC 300 GmbH & Co. KG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.