Granted Patent
Utility
US 6,740,163 · App. 10/021,501
Photoresist recirculation and viscosity control for dip coating applications
Inventors:
Donald E. Curtiss, Joseph Leigh, Frank Quan
Patented Case
View Patent ↗
Granted: May 25, 2004
Filed: Dec 19, 2001
Inventors
Donald E. Curtiss
Joseph Leigh
Frank Quan
Assignee (at issue)
Seagate Technology LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.