Granted Patent
Utility
US 6,740,368 · App. 10/001,333
Beam shaped film pattern formation method
Inventor:
Takashi Kaito
Patented Case
View Patent ↗
Granted: May 25, 2004
Filed: Oct 26, 2001
Inventor
Takashi Kaito
Assignee (at issue)
SII NanoTechnology Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.