Granted Patent
Utility
US 6,740,568 · App. 10/206,875
Method to enhance epitaxial regrowth in amorphous silicon contacts
Inventors:
Yun-Yu Wang, Johnathan E. Faltermeier, Colleen Snavely, Michael Maldei, Michael Iwatake, David M. Dobuzinsky, Ravikumar Ramachandran, Viraj Y. Sardesai, Philip L. Flaitz, Lisa Y. Ninomiya
Patented Case
View Patent ↗
Granted: May 25, 2004
Filed: Jul 29, 2002
Inventors
Yun-Yu Wang
Johnathan E. Faltermeier
Colleen Snavely
Michael Maldei
Michael Iwatake
David M. Dobuzinsky
Ravikumar Ramachandran
Viraj Y. Sardesai
Philip L. Flaitz
Lisa Y. Ninomiya
Assignees (at issue)
Infineon Technologies AG
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.