Granted Patent
Utility
US 6,740,571 · App. 10/202,992
Method of etching a dielectric material in the presence of polysilicon
Inventor:
Hua Ji
Patented Case
View Patent ↗
Granted: May 25, 2004
Filed: Jul 25, 2002
Inventor
Hua Ji
Assignee (at issue)
MOSEL VITELIC INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.