Granted Patent
Utility
US 6,740,891 · App. 09/989,700
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Inventors:
Johannes C. Driessen, Hermanus M. J. R. Soemers, Michael J. M. Renkens, Theodorus Hubertus Josephus Bisschops, Johannes Petrus Martinus Bernardus Vermeulen, Antonius Maria Rijken
Patented Case
View Patent ↗
Granted: May 25, 2004
Filed: Nov 21, 2001
Inventors
Johannes C. Driessen
Hermanus M. J. R. Soemers
Michael J. M. Renkens
Theodorus Hubertus Josephus Bisschops
Johannes Petrus Martinus Bernardus Vermeulen
Antonius Maria Rijken
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.