IP Library Granted Patent US 6,741,362
Granted Patent Utility
US 6,741,362 · App. 10/138,714

Method, system, and computer program product for determining refractive index distribution

Inventors: Stanislav Smirnov, Mark Oskotsky, Lev Sakin, John Martin
Patented Case View Patent ↗
Granted: May 25, 2004 Filed: May 6, 2002
Inventors
Stanislav Smirnov
Mark Oskotsky
Lev Sakin
John Martin
Assignee (at issue)
ASML Holding N.V.

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Quick Facts
Patent No.
US 6,741,362
App. No.
10/138,714
Filed
2002-05-06
Granted
2004-05-25
Kind
B2