Granted Patent
Utility
US 6,741,621 · App. 10/242,251
Laser irradiation apparatus and method of treating semiconductor thin film
Inventor:
Akihiko Asano
Patented Case
View Patent ↗
Granted: May 25, 2004
Filed: Sep 12, 2002
Inventor
Akihiko Asano
Assignee (at issue)
SONY GROUP CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.