Granted Patent
Utility
US 6,743,572 · App. 10/134,888
Method for structuring a photoresist layer
Inventors:
Ernst-Christian Richter, Michael Sebald
Patented Case
View Patent ↗
Granted: Jun 1, 2004
Filed: Apr 29, 2002
Inventors
Ernst-Christian Richter
Michael Sebald
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.