Granted Patent
Utility
US 6,743,646 · App. 10/035,925
Balancing planarization of layers and the effect of underlying structure on the metrology signal
Inventors:
Nickhil Jakatdar, Xinhui Niu
Patented Case
View Patent ↗
Granted: Jun 1, 2004
Filed: Oct 22, 2001
Inventors
Nickhil Jakatdar
Xinhui Niu
Assignee (at issue)
TIMBRE TECHNOLOGIES, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.