Granted Patent
Utility
US 6,743,722 · App. 10/059,701
Method of spin etching wafers with an alkali solution
Inventor:
Salman Kassir
Patented Case
View Patent ↗
Granted: Jun 1, 2004
Filed: Jan 29, 2002
Inventor
Salman Kassir
Assignee (at issue)
Strasbaugh
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.