Granted Patent
Utility
US 6,743,738 · App. 10/294,233
Dopant precursors and processes
Inventor:
Michael A. Todd
Patented Case
View Patent ↗
Granted: Jun 1, 2004
Filed: Nov 13, 2002
Inventor
Michael A. Todd
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.