Granted Patent
Utility
US 6,744,173 · App. 09/810,333
Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
Inventors:
Behrang Behin, Satinderpall S. Pannu
Patented Case
View Patent ↗
Granted: Jun 1, 2004
Filed: Mar 14, 2001
Inventors
Behrang Behin
Satinderpall S. Pannu
Assignee (at issue)
Analog Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.