Granted Patent
Utility
US 6,746,539 · App. 09/772,694
Scanning deposition head for depositing particles on a wafer
Inventors:
James J. Sun, Benjamin Y. H. Liu
Patented Case
View Patent ↗
Granted: Jun 8, 2004
Filed: Jan 30, 2001
Inventors
James J. Sun
Benjamin Y. H. Liu
Assignee (at issue)
MSP CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.