Granted Patent
Utility
US 6,747,340 · App. 10/099,720
Multi-level shielded multi-conductor interconnect bus for MEMS
Inventors:
Stephen Barnes, Samuel Lee Miller, Murray Steven Rodgers
Patented Case
View Patent ↗
Granted: Jun 8, 2004
Filed: Mar 15, 2002
Inventors
Stephen Barnes
Samuel Lee Miller
Murray Steven Rodgers
Assignee (at issue)
MEMX, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.