Granted Patent
Utility
US 6,747,729 · App. 09/899,566
Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition
Inventors:
Wouter Onno Pril, Philip D. Henshaw, Engelbertus A. F. van de Pasch, Marcel Hendrikus Maria Beems
Patented Case
View Patent ↗
Granted: Jun 8, 2004
Filed: Jul 6, 2001
Inventors
Wouter Onno Pril
Philip D. Henshaw
Engelbertus A. F. van de Pasch
Marcel Hendrikus Maria Beems
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.