Granted Patent
Utility
US 6,748,280 · App. 10/171,758
Semiconductor run-to-run control system with state and model parameter estimation
Inventors:
Jianping Zou, James A. Mullins, Keith A. Edwards
Patented Case
View Patent ↗
Granted: Jun 8, 2004
Filed: Jun 14, 2002
Inventors
Jianping Zou
James A. Mullins
Keith A. Edwards
Assignee (at issue)
Brooks Automation GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.