Granted Patent
Utility
US 6,749,067 · App. 10/345,088
Wafer carrier door with form fitting mechanism cover
Inventor:
Shawn D. Eggum
Patented Case
View Patent ↗
Granted: Jun 15, 2004
Filed: Jan 14, 2003
Inventor
Shawn D. Eggum
Assignee (at issue)
ENTEGRIS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.