Granted Patent
Utility
US 6,749,489 · App. 10/121,825
Method and apparatus for planarizing and cleaning microelectronic substrates
Inventors:
David W. Carlson, Scott A. Southwick, Scott E. Moore
Patented Case
View Patent ↗
Granted: Jun 15, 2004
Filed: Apr 11, 2002
Inventors
David W. Carlson
Scott A. Southwick
Scott E. Moore
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.