Granted Patent
Utility
US 6,750,949 · App. 10/193,688
Lithographic apparatus and device manufacturing method
Inventors:
Erik Roelof Loopstra, Dominicus Jacobus Petrus Adrianus Franken, Josephus Jacobus Smits, Antonius Johannes Josephus Van Dijsseldonk, Johannes Hubertus Josephina Moors, Albrecht Hof, Günter Maul, Michael Mühlbeyer, Klaus Mehlkopp
Patented Case
View Patent ↗
Granted: Jun 15, 2004
Filed: Jul 12, 2002
Inventors
Erik Roelof Loopstra
Dominicus Jacobus Petrus Adrianus Franken
Josephus Jacobus Smits
Antonius Johannes Josephus Van Dijsseldonk
Johannes Hubertus Josephina Moors
Albrecht Hof
Günter Maul
Michael Mühlbeyer
Klaus Mehlkopp
Assignee (at issue)
AMSL Netherlands B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.