Granted Patent
Utility
US 6,750,972 · App. 10/173,190
Gas discharge ultraviolet wavemeter with enhanced illumination
Inventors:
Richard L. Sandstrom, John T. Melchior, Rajasekhar Rao
Patented Case
View Patent ↗
Granted: Jun 15, 2004
Filed: Jun 14, 2002
Inventors
Richard L. Sandstrom
John T. Melchior
Rajasekhar Rao
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.