Granted Patent
Utility
US 6,753,133 · App. 10/091,531
Method and manufacturing a semiconductor device having a ruthenium or a ruthenium oxide
Inventors:
Yasuhiro Ono, Sota Shinohara
Patented Case
View Patent ↗
Granted: Jun 22, 2004
Filed: Mar 7, 2002
Inventors
Yasuhiro Ono
Sota Shinohara
Assignee (at issue)
ELPIDA MEMORY, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.