Granted Patent
Utility
US 6,753,271 · App. 10/222,282
Atomic layer deposition methods
Inventors:
Demetrius Sarigiannis, Garo Derderian, Cem Basceri, Gurtej S. Sandhu, F. Daniel Gealy, Chris M. Carlson
Patented Case
View Patent ↗
Granted: Jun 22, 2004
Filed: Aug 15, 2002
Inventors
Demetrius Sarigiannis
Garo Derderian
Cem Basceri
Gurtej S. Sandhu
F. Daniel Gealy
Chris M. Carlson
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.