Granted Patent
Utility
US 6,753,947 · App. 09/854,226
Lithography system and method for device manufacture
Inventors:
Dan Meisburger, David A. Markle
Patented Case
View Patent ↗
Granted: Jun 22, 2004
Filed: May 10, 2001
Inventors
Dan Meisburger
David A. Markle
Assignee (at issue)
Ultratech Stepper, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.