IP Library › Granted Patent US 6,756,247
Granted Patent Utility
US 6,756,247 · App. 10/083,600

Integrated large area microstructures and micromechanical devices

Inventors: Timothy Joel Davis, Scott G. Adams
Patented Case View Patent ↗
Granted: Jun 29, 2004 Filed: Feb 27, 2002
Inventors
Timothy Joel Davis
Scott G. Adams

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Quick Facts
Patent No.
US 6,756,247
App. No.
10/083,600
Filed
2002-02-27
Granted
2004-06-29
Kind
B1