Granted Patent
Utility
US 6,756,264 · App. 10/198,924
Applying epitaxial silicon in disposable spacer flow
Inventors:
Chih-Chen Cho, Er-Xuan Ping
Patented Case
View Patent ↗
Granted: Jun 29, 2004
Filed: Jul 19, 2002
Inventors
Chih-Chen Cho
Er-Xuan Ping
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.