Granted Patent
Utility
US 6,758,339 · App. 10/194,981
Thin wafer carrier
Inventors:
Anthony Simpson, Brian Wiseman
Patented Case
View Patent ↗
Granted: Jul 6, 2004
Filed: Jul 11, 2002
Inventors
Anthony Simpson
Brian Wiseman
Assignee (at issue)
ENTEGRIS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.