Granted Patent
Utility
US 6,759,665 · App. 09/865,155
Method and system for ion beam containment in an ion beam guide
Inventors:
Victor M. Benveniste, William F. DiVergilio, John Zheng Ye
Patented Case
View Patent ↗
Granted: Jul 6, 2004
Filed: May 24, 2001
Inventors
Victor M. Benveniste
William F. DiVergilio
John Zheng Ye
Assignee (at issue)
Axcelis Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.