Granted Patent
Utility
US 6,760,115 · App. 09/863,512
Carrier shape measurement device
Inventors:
Fusao Shimizu, Atsuhiro Fujii
Patented Case
View Patent ↗
Granted: Jul 6, 2004
Filed: May 24, 2001
Inventors
Fusao Shimizu
Atsuhiro Fujii
Assignees (at issue)
NIKON CORPORATION
Semiconductor Leading Edge Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.